Electromechanical model of RF MEMS switches
نویسندگان
چکیده
منابع مشابه
Electromechanical Modeling and Simulation of RF MEMS Switches
The design of RF MEMS switches involves several disciplines: mechanics, materials science and electrical engineering. While significant progress has been made in the RF design of the switches, mechanical and material studies are required for mass commercialization of reliable devices. Senturia and co-workers at MIT have presented a closed form solution to describe the electromechanical behavior...
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This paper reports on the design, fabrication, and testing of a low-actuation voltage Microelectromechanical systems (MEMS) switch for high-frequency applications. The mechanical design of low spring-constant folded-suspension beams is presented first, and switches using these beams are demonstrated with measured actuation voltages of as low as 6 V. Furthermore, common nonidealities such as res...
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An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.
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RF MEMS capacitive switches show great potential for use in wireless communication device. However, their widespread insertion in commercial products requires further improvements in their longterm reliability. Dielectric charging is one of the factors that impact switch reliability. Dielectric charging is understood to mean the accumulation of electric charge in the insulating dielectric layer...
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ژورنال
عنوان ژورنال: Microsystem Technologies
سال: 2003
ISSN: 0946-7076,1432-1858
DOI: 10.1007/s00542-002-0250-2